Vacuum-compatible submicron feedback stage with 50mm operation
Vacuum-compatible positioning stage with sub-micron resolution and a range of 50mm.
It is driven using a stepping motor and ball screw, which provides excellent position holding capability. The built-in optical linear encoder detects the stage's position and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 50mm with a resolution of either 50nm or 100nm (depending on the controller).
- Company：シグマ光機
- Price：Other
